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High NA EUV reaches new readiness milestone with first high-volume Logic product
GlobeNewswire Inc.·
Intel Foundry has begun high-volume manufacturing of Intel Core Ultra Series 3 processors (Panther Lake) using ASML's High NA EUV lithography technology on the Intel 18A process node. This marks the first commercial production of logic chips using High NA EUV, with specific layers now dual-qualified in Oregon and product shipping to customers at yields matching the NXE platform. The milestone demonstrates the technology's readiness for broader adoption in advanced semiconductor manufacturing.
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