ACM Research Enhances Single-Wafer Hot SPM System with Sulfuric Acid Recycle Capability

ACM Research unveiled an enhanced version of its 170°C Single-Wafer Hot SPM system featuring a new sulfuric acid recycle capability that achieves a 70% recycle rate while maintaining particle control. The system has been validated across more than 50 process layers at a foundry customer and is expected to save approximately 400 tons of sulfuric acid per tool annually, delivering significant environmental and cost benefits for semiconductor manufacturers.